ACCRETECH Probe Station UF3000EX

ACCRETECH Probe Station UF3000EX is an electrical signal detection device for each chip on each wafer, designed to ensure the quality of semiconductor products. The device uses next-generation technology, which significantly improves production capacity through new algorithms and wafer handling technology. Its high-speed, low-noise X and Y axis platforms benefit from the new drive system, while the Z axis ensures world-class load capacity and high precision. The design structure of the device reliably eliminates the force on the plane through the good combination of optimal structural design and topology. In addition, the advanced OTS position processing system and color wafer image alignment system, as well as the small maximum magnification function equipped, make UF3000EX a high-precision and operable device in the industry.

Main Features

‌High speed and low noise‌: The new drive system makes the X and Y axis platforms run efficiently and quietly.

‌High precision‌: The Z axis ensures world-class load capacity and high precision.

‌Structural optimization‌: The force on the plane is eliminated through the good combination of optimal structural design and topology.

‌Advanced positioning system‌: Equipped with advanced OTS position processing system and color wafer image alignment system, with small maximum magnification magnification function.

‌Compatibility‌: Suitable for large diameter wafers (φ300 mm, up to 12 inches), with automatic operating system, high-precision detection, high throughput, low vibration, etc. ‌.

Application field

UF3000EX probe station is widely used in wafer testing in the semiconductor manufacturing process, especially in the production lines of LSI and VLSI, which can provide efficient and accurate electrical signal detection to ensure product quality and production efficiency ‌