Imashini ikata wa DISCO DFL7341

Imashini yo gukata wafer ya DISCO: Imashini yo gukata ya DFL7341 itagaragara yibanda kuri lazeri ya infragre ifite uburebure bwa metero 1300nm imbere muri wafer ya silicon kugirango ikore urwego rwahinduwe, hanyuma igabanye wafer mu binyampeke mu kwagura firime nubundi buryo bwo kugera ku byangiritse bike, ibisobanuro bihanitse, hamwe ningaruka nziza zo guca. Ubu buryo bugizwe gusa nigice cyahinduwe imbere muri silicon wafer, gihagarika ibisekuruza byo gutunganya imyanda, kandi birakwiriye kuburugero hamwe nibisabwa byinshi.

Ubusobanuro buhanitse kandi bunoze: DFL7341 ikoresha tekinoroji yo gutunganya yumye, ntisaba isuku, kandi irakwiriye gutunganya ibintu bifite imitwaro idahwitse. Ubugari bwibiti byacyo birashobora kuba bigufi cyane, bifasha kugabanya inzira yo guca. Disiki ikora ifite ubusobanuro buhanitse, X-axis umurongo ugereranije ni ≤0.002mm / 210mm, umurongo wa Y-axis ni ≤0.003mm / 210mm, naho Z-axis ihagaze neza ni .00.001mm. Umuvuduko wo kugabanya umuvuduko ni 1-1000 mm / s, naho imiterere yikigereranyo ni 0.1 micron.

Igipimo cyo gusaba: Ibikoresho bikoreshwa cyane cyane mugukata wafer ya silicon ifite ubunini ntarengwa bwa santimetero 8. Birakwiye gukata wafer ya silicon yera ifite umubyimba wa 0.1-0.7mm n'ubunini burenze 0.5mm. Ibimenyetso byo gushushanya nyuma yo gukata ni microne nkeya, kandi nta mpande zisenyuka cyangwa gushonga kwangirika hejuru ninyuma ya wafer.

Ibipimo bya tekiniki: Sisitemu yo gukata ya DFL7341 itagaragara ikubiyemo kuzamura cassette, convoyeur, sisitemu yo guhuza, sisitemu yo gutunganya, sisitemu yo gukora, icyerekezo cyimiterere, moteri ya laser, chiller nibindi bice. Umuvuduko wa X-axis ni 1-1000 mm / s, icyerekezo cya Y-axis ni 0.1 micron, naho umuvuduko wo kugenda ni 200 mm / s; ibipimo bya Z-axis ni 0.1 micron, naho umuvuduko ugenda ni 50 mm / s; Q-axis ishobora guhinduka ni dogere 380.

Ibisabwa byo gusaba: DFL7341 ikwiranye ninganda ziciriritse, cyane cyane mubikorwa byo gupakira chip, zishobora kwemeza neza no gutekera ibicuruzwa bipfunyika, bikongerera ubushobozi ubushobozi bwa chip, kandi bikanoza umusaruro. Muri make, imashini ikata DISCO DFL7341 igira uruhare runini munganda zikoresha amashanyarazi. Binyuze mu buhanga bwayo buhanitse kandi bunoze bwo guca ibintu, butanga ubwiza n’umusaruro w’ibicuruzwa.