ACCRETECH Probe Station UF3000EX nigikoresho cyo kumenya ibimenyetso byamashanyarazi kuri buri chip kuri buri wafer, yagenewe kwemeza ubuziranenge bwibicuruzwa byifashishwa. Igikoresho gikoresha tekinoroji izakurikiraho, itezimbere cyane ubushobozi bwumusaruro binyuze muri algorithm nshya hamwe nubuhanga bwo gukoresha wafer. Umuvuduko wacyo mwinshi, urusaku ruke X na Y axis yungukira kuri sisitemu nshya ya disiki, mugihe Z axis itanga ubushobozi bwurwego rwisi rwo gutwara ibintu kandi neza. Igishushanyo mbonera cyigikoresho gikuraho byimazeyo imbaraga zindege binyuze muburyo bwiza bwo gushushanya neza hamwe na topologiya. Mubyongeyeho, sisitemu yambere yo gutunganya imyanya ya OTS hamwe na sisitemu yo guhuza amabara ya wafer, kimwe nigikorwa gito cyo gukuza ibikoresho gifite ibikoresho, bituma UF3000EX igikoresho gisobanutse neza kandi gikoreshwa muruganda.
Ibyingenzi
Umuvuduko mwinshi n urusaku ruke: Sisitemu nshya ya sisitemu ituma X na Y axis ya platform ikora neza kandi ituje.
Ubusobanuro buhanitse: Z axis itanga ubushobozi bwurwego rwisi rwo gutwara ibintu kandi neza.
Gutezimbere muburyo bwiza: Imbaraga zindege zavanyweho binyuze muburyo bwiza bwo gushushanya neza hamwe na topologiya.
Sisitemu yo kumwanya wambere: Yashyizwe hamwe na sisitemu yo gutunganya imyanya ya OTS hamwe na sisitemu yo guhuza amabara ya wafer, hamwe nibikorwa bito byo gukuza cyane.
Ubwuzuzanye: Bikwiranye na waferi nini ya diameter (mm300 mm, kugeza kuri santimetero 12), hamwe na sisitemu y'imikorere yikora, gutahura neza-neza, kwinjiza cyane, kunyeganyega hasi, n'ibindi.
Umwanya wo gusaba
Sitasiyo ya UF3000EX ikoreshwa cyane mugupima wafer mugikorwa cyo gukora semiconductor, cyane cyane mumirongo ikora LSI na VLSI, ishobora gutanga ibimenyetso byerekana amashanyarazi neza kandi neza kugirango ibicuruzwa bibe byiza kandi bikore neza