AMS-i mumashini ibumba BESI ni sisitemu yo guteranya no kugerageza byakozwe na BESI. BESI ni sosiyete ikora ibikoresho bya semiconductor na microelectronics ikora ibikoresho bifite icyicaro gikuru mu Buholandi. Yashinzwe mu 1995 kandi yibanda ku gutanga ibikoresho bigezweho byo guteranya igice cya semiconductor n’inganda za elegitoroniki ku isi. Ibicuruzwa byayo birimo gutandukanya wafer, sisitemu yo guteranya hamwe na sisitemu yo kugerageza, nibindi, kandi ifite biro nu miyoboro yo kugurisha mubihugu byinshi no mukarere kwisi.
Ibyingenzi byingenzi nibisabwa bya AMS-i
AMS-i ni porogaramu itaziguye igaragara kuri BESI hamwe nibintu byingenzi bikurikira:
Ultra-thin igishushanyo: Bikwiranye nuburyo butandukanye bwo guhuza umwanya.
Kode-yuzuye-optique ya kodegisi: Itanga ibitekerezo bihanitse neza.
Irashobora gutondekwa: Irashobora guhuzwa muburyo bworoshye muri XY cyangwa XYT, ikwiranye nuburyo butandukanye bwo gusaba.
Igisubizo cyinshi: Birakwiriye kugenzurwa byihuse byihuta.
Ubusobanuro buhanitse: Subiramo umwanya uhagaze neza ushobora kugera kuri ± 0.3 mm, kandi gukemura birashobora gutoranywa nka 0.2 mm, 0.05μm, nibindi 2.
Ahantu hasabwa AMS-i
AMS-i ikwiranye na sub-micron ihagaze, optique ihuza optique, kugenzura imbaraga nizindi nzego. Bitewe nibisobanuro bihanitse kandi biranga ibisubizo bihanitse, birakwiriye cyane cyane mubikorwa byinganda bisaba guhagarara neza no kugenzura, nko gukora semiconductor, gutunganya neza, nibindi.